3D TCAD Simulation for Semiconductor Processes, Devices and Optoelectronics

3D TCAD Simulation for Semiconductor Processes, Devices and Optoelectronics


Technology computer-aided design, or TCAD, is critical to todays semiconductor technology and anybody working in this industry needs to know something about TCAD. This book is about how to use computer software to manufacture and test virtually semiconductor devices in 3D. It brings to life the topic of semiconductor device physics, with a hands-on, tutorial approach that de-emphasizes abstract physics and equations and emphasizes real practice and extensive illustrations. Coverage includes a comprehensive library of devices, representing the state of the art technology, such as SuperJunction LDMOS, GaN LED devices, etc.

Table of contents

Front Matter....Pages i-xiv
Semiconductor Industry and TCAD....Pages 1-17
Advanced Theory of TCAD Process Simulation....Pages 19-39
Advanced Theory of TCAD Device Simulation....Pages 41-80
Setting Up a 3D TCAD Simulation....Pages 81-104
P-N Junction Diode....Pages 105-133
MOSFET/CMOS Technology....Pages 135-186
Smart Power Technology and Power Semiconductor Devices....Pages 187-236
3D Interconnect Simulation....Pages 237-249
CMOS Image Sensor....Pages 251-272
Hybrid Silicon Laser....Pages 273-282
Back Matter....Pages 283-292


  • Author: Simon Li, Yue Fu (auth.)
  • Edition: 1
  • Publication Date: 2012
  • Publisher: Springer-Verlag New York
  • ISBN-10: 1461404800
  • ISBN-13: 9781461404804
  • Pages: 307
  • Format: pdf
  • Size: 10.5M
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